Effect of Low Pressure on Surface Roughness and Morphological Defects of 4H-SiC Epitaxial Layers
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Institution:微电子学院
Title of Paper:Effect of Low Pressure on Surface Roughness and Morphological Defects of 4H-SiC Epitaxial Layers
Journal:MATERIALS
First Author:Hu, Jichao^Jia, Renxu^Xin, Bin^Peng, Bo^Wang, Yuehu^Zhang, Yuming
Document Code:SCI WOS:000382262000032
Volume:9
Issue:9
ISSN:1996-1944
Translation or Not:No
Date of Publication:2016-01-01
Included Journals:SCI
Date:2018-06-08