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Improved Semipolar (11 (2)over-bar2) GaN Quality Grown on m-Plane Sapphire Substrates by Metal Organic Chemical Vapor Deposition Using Self-Organized SiN (x) Interlayer

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Institution:微电子学院

Title of Paper:Improved Semipolar (11 (2)over-bar2) GaN Quality Grown on m-Plane Sapphire Substrates by Metal Organic Chemical Vapor Deposition Using Self-Organized SiN (x) Interlayer

Journal:CHINESE PHYSICS LETTERS

First Author:Xu, Sheng-Rui^Zhao, Ying^Jiang, Teng^Zhang, Jin-Cheng^Li, Pei-Xian^Hao, Yue

Document Code:SCI WOS:000378778800037

Volume:33

Issue:6

ISSN:0256-307X

Translation or Not:No

Date of Publication:2016-01-01

Included Journals:SCI

Date:2018-06-08

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