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Institution:微电子学院

Title of Paper:Type of Distortionless Through Silicon Via Design Based on the Multiwalled Carbon Nanotube

Journal:IET Micro & Nano Letters

First Author:Qijun Lu, Zhangming Zhu*, Yintang Yang, Ruixue Ding

Indexed by:Journal paper

Document Code:000329371000006

Discipline:Engineering

First-Level Discipline:Electronics Science and Technology

Document Type:J

Volume:8

Issue:12

Page Number:869−871

Translation or Not:No

Date of Publication:2013-12-01

Included Journals:SCI

Date:2018-12-03