Interface annealing characterization of Ti/Al/Au ohmic contacts to p-Type 4H-SiC
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Institution:微电子学院
Title of Paper:Interface annealing characterization of Ti/Al/Au ohmic contacts to p-Type 4H-SiC
Journal:Journal of Semiconductors
Document Code:EI 20160902006376
Volume:36
Issue:12
Translation or Not:No
Date of Publication:2015-01-01
Included Journals:EI
Date:2018-06-08