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Title:基于硅衬底高介电常数的栅介质材料及其制备方法

Institution:100900

Teaching and Research Group:1114

Scope of Patent:1

First Author:刘红侠

Application Number:201310280178.1

Number of Inventors:6

Service Invention or Not:No

Application Date:2013-07-04

Date:2018-06-01