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Institution:微电子学院

Title of Paper:Effects of post-annealing temperature and oxygen concentration during sputtering on the structural and optical properties of beta-Ga2O3 films

Journal:JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

First Author:Dong, Linpeng^Jia, Renxu^Xin, Bin^Zhang, Yuming

Document Code:SCI WOS:000388749600002

Volume:34

Issue:6

ISSN:0734-2101

Translation or Not:No

Date of Publication:2016-01-01

Included Journals:SCI

Date:2018-06-08