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Title:一种梯度结构氧化铪基铁电薄膜、铁电电容器及制备方法

Institution:先进材料与纳米科技学院

Scope of Patent:国内

First Author:周益春

Type of Patent:Invent

Application Number:CN202310744856.9

Authorization Number:CN202310744856.9

Number of Inventors:4

Service Invention or Not:No

Application Date:2023-06-21

Date:2024-07-06