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Title:一种铁电薄膜移相器、晶圆级相控阵芯片系统

Institution:先进材料与纳米科技学院

Scope of Patent:国内

First Author:周益春

Type of Patent:Invent

Application Number:CN202310492361.1

Authorization Number:CN202310492361.1

Number of Inventors:6

Service Invention or Not:No

Application Date:2023-05-04

Authorization Date:2023-12-26

Date:2024-06-24