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Enhanced Endurance And Imprint Properties in Hf0.5zr0.5o2-& Delta; Ferroelectric Capacitors by Tailoring the Oxygen Vacancy

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Title of Paper:Enhanced Endurance And Imprint Properties in Hf0.5zr0.5o2-& Delta; Ferroelectric Capacitors by Tailoring the Oxygen Vacancy

Journal:Acs Applied Electronic Materials

Correspondence Author:周益春

Volume:5

Issue:8

Page Number:4615-4623

Translation or Not:No

Date of Publication:2023-08-01

Date:2024-04-15

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