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Title:基于SiC衬底的太赫兹GaN耿氏二极管及其制作方法
Institution:微电子学院
Scope of Patent:国内
First Author:杨林安
Type of Patent:发明专利
Application Number:201210005728.4
Number of Inventors:4
Service Invention or Not:No
Application Date:2012-01-10
Authorization Date:2013-12-25
Date:2018-06-01