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一种基于硅基透镜的钪掺杂AlN高频超声换能器的制备方法

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Title:一种基于硅基透镜的钪掺杂AlN高频超声换能器的制备方法

Type of Patent:Invent

State of Patent:Pending patent

Application Number:20180325856.4

Service Invention or Not:No

Date:2018-09-05

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