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Title:一种基于硅基透镜的钪掺杂AlN高频超声换能器的制备方法

Institution:微电子学院

Scope of Patent:国内

First Author:费春龙

Type of Patent:Invent

Application Number:CN201810325856.4

Authorization Number:CN201810325856.4

Number of Inventors:5

Service Invention or Not:No

Application Date:2018-04-12

Date:2024-04-07