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Title:用于真空镀膜机扩散泵的水温控制循环冷却系统

Institution:101901

Teaching and Research Group:1117

Scope of Patent:1

First Author:张显

Type of Patent:1

Application Number:201410143119.4

Number of Inventors:2

Service Invention or Not:No

Application Date:2014-04-10

Date:2018-06-01