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Project Name:金刚石高效共掺杂多路微波等离子体CVD设备

Institution:微电子学院

Status:在研

Classification of Project:National Natural Science Foundation

Sub-Class of Project:National important scientific research instrument development project

Project Source:National Natural Science Foundation of China (NSFC)

Project Level:National

Project Number:B022250012

Discipline:Engineering

First-Level Discipline:Electronics Science and Technology

Date of Project Approval:2022-01-01

Project Approval Number:62127812

Date:2024-02-26