Transverse sensitivity suppression using multi-axis surface encoder with parasitic error compensation
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Title of Paper:Transverse sensitivity suppression using multi-axis surface encoder with parasitic error compensation
Journal:Applied Physics Letters
Abstract:https://pubs.aip.org/aip/apl/article/111/11/113507/149713/Transverse-sensitivity-suppression-using-multi
Indexed by:Letter
Translation or Not:no
Included Journals:SCI